Guiding technology in semiconductor equipment.
نویسندگان
چکیده
منابع مشابه
[Equipment and technology in robotics].
We review the evolution and current status of robotic equipment and technology in urology. We also describe future developments in the key areas of virtual reality simulation, mechatronics and nanorobotics. The history of robotic technology is reviewed and put into the context of current systems. Experts in the associated fields of nanorobotics, mechatronics and virtual reality simulation simul...
متن کاملDiffusion in Semiconductor Technology
The paper deals with the analysis of pair di usion models in semiconductor technology. The underlying model contains reaction-drift-di usion equations for the mobile point defects and dopant-defect pairs as well as reaction equations for immobile dopants which are coupled with a nonlinear Poisson equation for the chemical potential of the electrons. For homogeneous structures we present an exis...
متن کاملVirtual Prototyping of Semiconductor Processing Equipment
There are great expectations for modeling and virtual prototyping in the semiconductor equipment industry. We discuss key areas where modeling and analysis are being used and have met some of these expectations. We identify interdisciplinary analysis as a requisite for virtual prototyping that will continue to meet current and future expectations. Since semiconductor equipment represents a desi...
متن کاملSupporting the High-Technology Entrepreneur: Support Network Geographies for Semiconductor, Telecommunications Equipment, and Biotechnology Start-ups
though they bear no responsibility for any of the data or conclusions. The authors thank Olav Sorenson for providing data regarding the location of biotechnology firms and Sharmistha Bagchi-Sen and Allen Scott for comments and encouragement.
متن کاملManufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing
Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing Chia-Yu Hsu, Chen-Fu Chien* and Pei-Nong Chen Department of Information Management, Yuan Ze University, 135 Yuan-Tung Road, Chungli 32003, Taiwan, Republic of China; Department of Industrial Engineering and Engineering Management, National Tsing Hua University, 1...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1991
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.57.615